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PART SALES · Thermo Fisher · PRIMA PRO - Electronics

VIC (HS-AAE-VIC250E)

BrandThermo Fisher Scientific
カテゴリーPRIMA PRO - Electronics
Part NuberHS-AAE-VIC250E
Item NameVOD Inlet System Controller (MKS 250E)
Description- VOD/RH 真空可変プロセスに適用される質量分析計に搭載され、大気圧から0.1 mbar まで変化する圧力に対して質量分析計の VOD Inlet system の Control Valve を自動制御し、Ion Source に入る圧力と流量を一定に保ち、設定圧力点に比例して自動で Valve を制御する装置。 -プロセスに適用する PID 設定値および変数入力については当社までお問い合わせください。

- The VOD inlet system is designed to sample the gases from the waste gas duct in a VOD process. The main purpose of the inlet is to supply a fixed pressure of sample gas to the mass spectrometer ion source as the sample pressure varies during a process heat (1000 mbar – 0.3mbar).

- The gas sample supplied to the inlet system must be filtered and free from other contaminants such as liquids. This gas preparation system is not part of the inlet system and is not described here.

- The inlet also controls the introduction of calibration to the system to enable automatic calibration of the system. The inlet system is a single module which fits within the Prima dB enclosure.